Product Introduction
Flat Panel Display Production related Equipment
US Cleaner
This equipment cleans foreign matters adfered to FPD and etc. using ultrasonic air without contact.
Features and Intended Use
1.6 µm particle can be removed 100% by dry cleaner. As it is dry cleaning method, no need water, chemicals and etc. Cleaning on one side or both sides can be selected.
| Model | USC, USH series |
|---|---|
| Intended Use | Production of LCD, OLED and Solar panels |
An example of specifications
| Items | Specifications |
|---|---|
| Stage size | Correspond to up to 10th generation |
| Stage material | Correspond to various materials (ceramic) |
| Thrust up pin material | Correspond to various materials |
| Thrust up pin drive method | Pulse motor of cam mechanism |
| Thrust up stroke | From 50 mm to 105 mm (fixed) |
| Vacuum pad | Φ 15 mm made by VITON |
| Stage drive | Ball screw + AC servo motor |
| Stage speed | From 5 to 600 mm / sec |
| Setting method | Digital setting in operation panel |
| Cleaner head | Selectable |
| Head width | Effective length + α |
| Substrate thickness measurement | Installed |
| VCR | Option |
| Alignment mechanism | Option |
| Static electricity measure | Option |