AYM 850 S

Overview

Ultra high precision stage realizing positioning by sub-micron

Features

• High resolution: 0.1 µm (Actual resolution)
• Long stroke: XY: +/- 10 mm, Θ: +/- 49 mrad
• High load: High thrust type linear motor adopted
• Thin type, high rigidity: UVWR method (4 axis drive)

AYM 850 S Specification

Item	Specifications	Remarks
Stage method	UVWR method
Drive method	Linear motor
Stroke	X axis: +/- 10 mm, Y axis: +/- 10 mm, Θ axis: +/- 49 mRad
Actual resolution	X axis: 0.1 µm, Y axis: 0.1 µm, Θ axis: 0.7 µRad	Design load: 400 kg
Stage size	850x850x190mm	Thin type

Accuracy: 0.1 µm step feed (Load 100 kg)